Production and Control of VHF Excited Plasmas by Superposing Two Standing Waves
نویسندگان
چکیده
The method of superposing the standing waves is the idea to generate VHF excited plasmas with excellent uniformity for large area processing. To get such plasmas, we generate two standing waves on the electrode, control the places of their own antinodes, and then, we superpose them. By using this method, VHF pure hydrogen plasmas are produced for various conditions. According to the photographs of produced plasmas and measurements of plasma parameters, it is confirmed that VHF excited plasmas with higher uniformity are well synthesized compared to the plasmas generated by the usual method.
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